Vacuum Tube Furnace - TSHvc12

Overview

The TSU furnace is a versatile Universal Tube Furnace that can be configured in both horizontal and vertical positions. This flexibility makes it suitable for a range of applications, including sample firing, chemical vapor deposition (CVD), and quenching tests. Position the furnace horizontally or at an angle for growing electronic crystals used in the semiconductor industry, or rotate it vertically for sintering applications.

Available in temperature ranges from 1200°C to 1600°C.

Highlights

  • Standard Features
  • Optional Features
  • The furnace design incorporates an integral elemental tube.
  • Protective outer mesh covers for improved operator safety.
  • High grade resistance wire wound heating elements.
  • Energy efficient, high quality, low thermal mass insulation.
  • Temperature Sensor: 'N' Type thermocouple.
  • High end Microprocessor PID controller.
  • Over temperature protection controller included.
  • Ceramic work tube.
  • Vacuum ready end flange gas tight seals.
  • Thermal radiation plugs.
  • Rotary pump-two stage sliding vane type for ultimate vacuum level up to 1 x 10-3 mbar with clean empty work tube.
  • Turbo molecular pump-ultimate vacuum level up to 1 x 10-5 mbar.
  • Pirani gauge-wide range full vacuum monitoring.
  • Flowmeter for control of gas throughput. Vacuum tight valve.
  • Gas in/outlet valve.
  • Multi segment, multi program storage controller.
  • Semi-automatic or fully automatic vacuum/heating cycles.
Multi Position Tube Furnace

Specifications

Model Max
Temp
(°C)
Max
Cont
(°C)
Tube
Diameter
(ID) (mm)
Heated
Length
(mm)
Nominal
Power
(kW)
Volts Phase Ext
Dimensions (mm)
HxWxD
Net
Wt.
(kg)
Radiation
Screens
Ceramic
Radiation
Screens
Metalic
TSHvc12/50/600-HV 1200 1150 50 600 4.0 230 1 1450x1850x700 195 ? ?
TSHvc12/50/600-LV 1200 1150 50 600 4.0 230 1 1450x1850x700 195 ? ?
TSHvc12/75/600-HV 1200 1150 75 600 4.0 230 1 1450x1850x700 195 ? ?
TSHvc12/75/600-LV 1200 1150 75 600 4.0 230 1 1450x1850x700 195 ? ?

Note: The TSHvc12 comes with an integral work tube. The additional worktubes are for use with in the integral work tube.

Custom Designed For all Tube furnaces, Elite Thermal manufactures custom-built furnaces. Please write to us with your requirement.

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